US Patent 6882415 Confocal 3D inspection system and process
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Patent abstract
A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.
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Patent Inventor Names
Cory Watkins0
David Vaughn0
Date of Patent
April 19, 2005
0Patent Application Number
101872950
Date Filed
July 16, 2002
0Patent Primary Examiner
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US Patent 6882415 Confocal 3D inspection system and process
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