Is a
Patent attributes
Patent Applicant
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hirofumi Hirayama0
Date of Patent
June 28, 2005
0Patent Application Number
106265430
Date Filed
July 25, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A control unit, which divides a controlled system into a plurality of zones and carries out control of the individual zones separately, can match the timings for the zones to reach a steady-state reference temperature by basic control. It can effectively reduce overshoot and undershoot after reaching the steady-state reference temperature, and suitably control the temperature of a wafer in the fabrication process of semiconductor devices.
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