US Patent 6913517 Microporous polishing pads
Patent 6913517 was granted and assigned to Cabot Microelectronics (company) on July, 2005 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 28, 2002
0
Date of Patent
July 5, 2005
0
Patent Application Number
10281782
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Patent Citations Received
Patent Inventor Names
Abaneshwar Prasad
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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