Methods for the preparation of oligonucleotides having bioreversible phosphate blocking groups are disclosed. In one aspect, the present invention provides compounds comprising a sequence of nucleotide units that includes a first segment having at least one internucleoside linkage of formula:3′-O—P(X)(O−)—O-5′and a second segment having at least one internucleoside linkage of formula:3′-O—P(X)(Y1—(CH2)q—Y2—Y3—Z)—O-5′wherein each of X, Y1, and Y2 is, independently, O or S; q is 2 to about 4; Y3 is C(═O) or S; and Z is aryl having 6 to about 14 carbon atoms or alkyl having from one to about six carbon atoms.