US Patent 6920312 RF generating system with fast loop control
Patent 6920312 was granted and assigned to Lam Research on July, 2005 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 2, 2002
0
Date of Patent
July 19, 2005
0
Patent Application Number
10038133
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Patent Citations Received
Patent Inventor Names
Neil Benjamin
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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