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US Patent 6944006 Guard for electrostatic chuck

Patent 6944006 was granted and assigned to Applied Materials on September, 2005 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Patent Applicant

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

69440060

Patent Inventor Names

Hong Wang0

Daniel M. Deyo0

Hui Zheng0

Jesus G. Garcia, III0

Kenneth Tsai0

Yongxiang He0

Date of Patent

September 13, 2005

Patent Application Number

104068890

Date Filed

April 3, 2003

Patent Citations Received

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US Patent 11955362 Substrate support for reduced damage substrate backside

Patent Primary Examiner

Stephen W. Jackson

Patent abstract

A guard for an electrostatic chuck includes a ceramic annulus that has an inner surface shaped to fit around a circumference of the electrostatic chuck, and an outer surface having (i) a top portion with a recessed trench and (ii) a side portion. A metal coating is provided on the top portion of the outer surface.

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