US Patent 6960057 Substrate transport apparatus

A substrate transport apparatus comprising a drive section and a robot transport arm. The robot transport arm is mounted to the drive section. The robot transport arm has a wrist and an end effector to hold the substrate thereon. The end effector is rotatably mounted to the wrist to rotate about the wrist. The rotation of the end effector about the wrist is slaved to the robot transport arm. The robot transport arm is adapted to transport substrates into and out of two general side-by-side orientated substrate holding areas with the drive section being located in only one location relative to the two holding areas.