US Patent 6962170 Microvalve for controlling fluid flow

A microvalve (10) for controlling fluid flow, including a body portion (14) having a plurality of spaced openings (18) formed therein, a shutter (12) located adjacent to and substantially parallel with the body portion having a plurality of spaced openings (16) formed therein, a drive mechanism (20, 22) for causing the shutter to move laterally with respect to the body portion so that the spaced openings of the shutter are brought into and out of alignment with the spaced openings of the body portion, wherein the microvalve is in an open position and a closed position, respectively, and, a latching mechanism (36, 38, 40, 42) for preventing the shutter from moving laterally with respect to the body portion.