US Patent 6967136 Method and structure for improved trench processing
Is a
Date Filed
August 1, 2003
0
Date of Patent
November 22, 2005
0
Patent Application Number
10604594
0
Patent Inventor Names
Kangguo Cheng
0
Hiroyuki Akatsu
0
Kenneth Settlemyer
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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