US Patent 6979822 Charged particle beam system
Patent 6979822 was granted and assigned to FEI Company on December, 2005 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 16, 2004
0
Date of Patent
December 27, 2005
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Patent Application Number
10801981
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Patent Citations Received
Patent Inventor Names
Diane K. Stewart
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Brian T. Kimball
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W. Ralph Knowles
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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