Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tarou Nakata0
Seishi Nakano0
Koji Seki0
Nobuhiko Zushi0
Shinichi Ike0
Shoji Kamiunten0
Date of Patent
January 3, 2006
0Patent Application Number
104345630
Date Filed
May 9, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a measurement target fluid and a thick fixing portion surrounding the diaphragm portion are integrally formed. The electrical insulating film is formed on a second surface of the diaphragm portion which is on a side opposite to the first surface. The flow velocity detection mechanism is arranged on the electrical insulating film. A method of manufacturing a flow sensor is also disclosed.
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