US Patent 6984163 Polishing pad with high optical transmission window
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Patent abstract
The present invention provides a chemical mechanical polishing pad comprising a polishing pad having a window formed therein and wherein the window is formed from a reaction of an aliphatic polyisocyanate, a hydroxyl-containing material and a curing agent.
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Patent Inventor Names
John V. H. Roberts0
Date of Patent
January 10, 2006
0Patent Application Number
107227390
Date Filed
November 25, 2003
0Patent Primary Examiner
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US Patent 6984163 Polishing pad with high optical transmission window
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