US Patent 6985215 Plasma processing method and plasma processing apparatus
Patent 6985215 was granted and assigned to Tokyo Electron on January, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 11, 2005
0
Date of Patent
January 10, 2006
0
Patent Application Number
11055612
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Patent Citations Received
Patent Inventor Names
Hin Oh
0
Hideaki Sato
0
Hisanori Sakai
0
Naoki Takayama
0
Yuichi Mimura
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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