Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Gerard Mourou0
Ajit P. Joglekar0
Alan J. Hunt0
Edgar Meyhofer0
Greg Spooner0
John A. Nees0
Date of Patent
February 7, 2006
0Patent Application Number
107656560
Date Filed
January 26, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Here is presented a versatile technique for machining of nanometer-scale features using tightly-focused ultrashort laser pulses. By the invention, the size of features can be reduced far below the wavelength of light, thus enabling nanomachining of a wide range of materials. The features may be extremely small (<20 nm) and are highly reproducible.
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