Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Cangshan Xu0
Jingang Yi0
Date of Patent
February 21, 2006
0Patent Application Number
106093570
Date Filed
June 27, 2003
0Patent Citations Received
0
0
Patent Primary Examiner
Patent abstract
Broadly speaking, a method for controlling a chemical mechanical planarization (CMP) process to obtain a desired result is provided. More specifically, the method incorporates a first neural network to estimate a CMP result and a second neural network to tune CMP control parameters used to obtain the CMP result. The second neural network tunes the CMP control parameters to minimize a difference between the CMP result and a desired CMP result.
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