Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hung Chih Chen0
Steven M. Zuniga0
Date of Patent
February 21, 2006
0Patent Application Number
101871430
Date Filed
June 28, 2002
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A compressible film that is detachably securable to a surface of a rigid structure in the carrier head. The compressible film has a plurality of apertures positioned to create a non-uniform pressure distribution on a substrate during polishing so as to improve polishing uniformity. The apertures may be spaced and positioned to provide a pressure distribution on the substrate that is locally uniform but globally non-uniform.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
