Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shinichiro Hayashi0
Yoshihisa Nagano0
Date of Patent
March 21, 2006
0Patent Application Number
109164820
Date Filed
August 12, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A capacitive element includes a lower electrode having a three-dimensional shape, an upper electrode formed so as to be opposed to the lower electrode, and a capacitor insulating film formed between the lower and upper electrodes and made of a crystallized ferroelectric material. The thickness of the capacitor insulating film is set at 12.5 through 100 nm both inclusive.
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