Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Manoocher Birang0
Boguslaw A. Swedek0
Date of Patent
March 21, 2006
0Patent Application Number
103591070
Date Filed
February 4, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Improved endpoint detection and/or thickness measurements may be obtained by correcting sensor data using calibration parameters and/or drift compensation parameters. Calibration parameters may include an offset and a slope, or other parameters. Drift compensation parameters may include off-wafer measurements.
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