US Patent 7017609 Gas supply unit
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Patent abstract
A gas supply unit includes fluid control devices and piping blocks so that the fluid control devices are mounted on the upper surfaces of the piping blocks and thus connected with each other, constituting a part of a gas supply line. A filter block including a filter element in a passage providing communication between the fluid control device and the piping block is connected between the fluid control device and the piping block.
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Patent Inventor Names
Toshikazu Miwa0
Date of Patent
March 28, 2006
0Patent Application Number
106623380
Date Filed
September 16, 2003
0Patent Primary Examiner
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US Patent 7017609 Gas supply unit
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