Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kazuhiko Mishima0
Date of Patent
March 28, 2006
0Patent Application Number
102312790
Date Filed
August 30, 2002
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A position detection method of illuminating an object to be observed with an illumination system having a variable illumination condition to detect a position of the object to be observed by a position detection system, including the steps of measuring each of mark spacings between a plurality of alignment marks arranged on the object to be observed, and selecting the illumination condition on the basis of mark spacing information obtained as the measurement result.
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