Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Floris Pepijn van der Wilt0
Ernst Habekotte0
Johannes Christiaan van 't Spijker0
Marco Jan-Jaco Wieland0
Date of Patent
March 28, 2006
0Patent Application Number
109091670
Date Filed
July 29, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The invention relates to a modulator for modulating the magnitude of a beamlet in a multi-beamlet lithography system, said modulator comprising at least one means for influencing the direction of a beamlet, a light sensitive element for receiving light from a modulated light beam and converting said light into a signal, and discretizing means, coupling to said light sensitive element and to at least one of means for influencing, for converting said signal received from said light sensitive element into a discrete signal having discrete values selected from a set of predefined discrete values and providing said discrete signal to said means for influencing.
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