Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kiyofumi Sakaguchi0
Takao Yonehara0
Date of Patent
April 18, 2006
0Patent Application Number
111006050
Date Filed
April 7, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A thin-film semiconductor device with a reduced influence on a device formation layer in separation and a method of manufacturing the device are provided. The manufacturing method includes the step of preparing a member having a semiconductor film with a semiconductor element and/or semiconductor integrated circuit on a separation layer, the separation step of separating the member at the separation layer by a pressure of a fluid, and the chip forming step of, after the separation step, forming the semiconductor film into chips.
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