US Patent 7034375 Micro electromechanical systems thermal switch
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Patent abstract
A Micro Electro-Mechanical Systems (MEMS) thermal switch. The switch includes a FET having a source and drain in a substrate and a beam isolated from the substrate. The beam is positioned over the source and the drain and spaced by a predefined gap. When the thermal set point is reached, the beam moves to electrically connect the source to the drain.
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Patent Inventor Names
Joon-Won Kang0
Date of Patent
April 25, 2006
0Patent Application Number
103715720
Date Filed
February 21, 2003
0Patent Primary Examiner
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US Patent 7034375 Micro electromechanical systems thermal switch
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