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US Patent 7038289 Deep insulating trench
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Patent
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Date Filed
June 13, 2002
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Date of Patent
May 2, 2006
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Patent Application Number
10479639
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Patent Citations Received
US Patent 12027580 Semiconductor on insulator wafer with cavity structures
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US Patent 12112981 Semiconductor device and method for fabricating semiconductor device
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US Patent 12136649 Deep trench isolation structures with a substrate connection
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Patent Inventor Names
Michel Marty
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Arnoud Fortuin
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Vincent Arnal
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
7038289
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Patent Primary Examiner
Dung A. Le
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