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US Patent 7039888 Modeling process for integrated circuit film resistors

Patent 7039888 was granted and assigned to Texas Instruments on May, 2006 by the United States Patent and Trademark Office.

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Patent abstract

A method is presented, in which a thin film resistor is modeled to account for self-heating. The method includes fabricating the thin film resistor and characterizing a thermal resistance of the thin film resistor, wherein the thermal resistance accounts for self-heating thereof during operation. The thermal resistance is then used in a model for simulating integrated circuits using the thin film resistor.

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