US Patent 7053009 Nanolaminate film atomic layer deposition method
Is a
Date Filed
March 24, 2005
0
Date of Patent
May 30, 2006
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Patent Application Number
11089947
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Patent Inventor Names
Rajendra Solanki
0
John F. Conley, Jr.
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Yoshi Ono
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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