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US Patent 7053017 Reduced striae extreme ultraviolet elements

Patent 7053017 was granted and assigned to Corning on May, 2006 by the United States Patent and Trademark Office.

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Patent abstract

Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.

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