US Patent 7053425 Gas sensor device
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Patent abstract
A gas sensor device including a semiconductor substrate; one or more catalytic gate-electrodes deposited on a surface of the semiconductor substrate; one or more ohmic contacts deposited on the surface of the semiconductor substrate and a passivation layer deposited on at least a portion of the surface; wherein the semiconductor substrate includes a material selected from the group consisting of silicon carbide, diamond, Group III nitrides, alloys of Group III nitrides, zinc oxide, and any combinations thereof.
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Patent Inventor Names
David Mulford Shaddock0
Deborah Ann Haitko0
Jesse Tucker0
John Patrick Lemmon0
Jonathan Lloyd Male0
Mark Allen Woodmansee0
Peter Micah Sandvik0
Stanton Earl Weaver0
Venkatesan Manivannan0
Vinayak Tilak0
Date of Patent
May 30, 2006
0Patent Application Number
107067670
Date Filed
November 12, 2003
0Patent Primary Examiner
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US Patent 7053425 Gas sensor device
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