Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
John V. Sandusky0
Date of Patent
May 30, 2006
0Patent Application Number
108664240
Date Filed
June 10, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods for differential numerical aperture analysis of samples, utilizing angle-of-incidence measurements resulting from variable illumination or observation numerical apertures, or both. Metrology applications are provided, and more particularly including scatterometer, ellipsometer and similar analysis methods, including bi-directional reflectance or transmission distribution function measurement.
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