US Patent 7065239 Automated repetitive array microstructure defect inspection
Patent 7065239 was granted and assigned to Applied Materials on June, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 24, 2001
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Date of Patent
June 20, 2006
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Patent Application Number
09682850
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Patent Citations Received
Patent Inventor Names
Jun Liu
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Harry Stanton Gallarda, Jr.
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Kais Jameel Maayah
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Lakshman Srinivasan
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Richard Barnard
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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