US Patent 7087443 Optimized temperature controller for cold mass introduction
Patent 7087443 was granted and assigned to Brooks Automation on August, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 29, 2003
0
Date of Patent
August 8, 2006
0
Patent Application Number
10628981
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Patent Inventor Names
Kevin D. Stoddard
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Christopher R. Hornberg
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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