Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuelin Lee Zou0
John Heck0
Leonel R. Arana0
Date of Patent
August 8, 2006
0Patent Application Number
108078360
Date Filed
March 24, 2004
0Patent Primary Examiner
Patent abstract
A microfabricated vacuum sensor may be formed using semiconductor integrated circuit processes. The sensor may be formed inside an enclosure with a microfabricated component. The sensor may then be used to measure the pressure within the enclosure.
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