US Patent 7088037 Field emission display device

Patent 7088037 was granted and assigned to Micron Technology on August, 2006 by the United States Patent and Trademark Office.

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Patent Inventor Names

Kanwal K. Raina0

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Patent abstract

A system and method for fabricating a FED device is disclosed. The system and method provide for use of PECVD hydrogenation followed by nitrogen plasma treatment of the tip of the current emitter of the FED device. The use of this process greatly reduces the native oxides in the tip of the current emitter. Such native oxides function as undesirable insulators degrading current emission. By reducing the amount of oxides in the tip, this invention provides for an increase in the current emission of the FED device.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=07088037

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