Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Koen Van Ingen Schenau0
Date of Patent
August 8, 2006
0Patent Application Number
106487960
Date Filed
August 27, 2003
0Patent Primary Examiner
Patent abstract
A transport unit transfers a substrate between a chamber enclosing a substrate table and a processing unit that process a substrate before and after exposure in a substantially contaminant free environment to minimize the exposure of the resist on the substrate to the contaminants.
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