US Patent 7089164 Control of overlay registration
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Patent abstract
A system and method are disclosed for controlling a registration overlay. The method comprises estimating a state using moving horizon estimation and determining an input of the registration overlay using the state. The system comprises an estimator configured to determine a state using moving horizon estimation; and a regulator configured to determine an input of the registration overlay using the state.
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US Patent 07089164 Control of overlay registration US Patent 7089164 Control of overlay registration
Infobox
Patent Number
0708916400
Patent Number
708916400
Edits on 31 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
070891640
Date of Patent
August 8, 2006
0Patent Application Number
106659800
Date Filed
September 19, 2003
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
070891640
Date of Patent
August 8, 2006
0Patent Application Number
106659800
Date Filed
September 19, 2003
0Official Website
Patent Primary Examiner
Edits on 7 Jun, 2022
Golden AI
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US Patent 07089164 Control of overlay registration
Infobox
Is a
Patent jurisdiction
Patent number
07089164
Date of patent
August 8, 2006
Patent application number
10665980
Date Filed
September 19, 2003
Patent primary examiner
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