US Patent 7089687 Wafer edge wheel with drying function

Patent 7089687 was granted and assigned to Lam Research on August, 2006 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Lam Research

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

70896870

Patent Inventor Names

John Parks0

Date of Patent

August 15, 2006

Patent Application Number

109571460

Date Filed

September 30, 2004

Patent Primary Examiner

‌

S. Gravini

Patent abstract

An edge wheel for supporting and rotating a disk-shaped substrate includes a wheel body having a peripheral groove configured to support an edge of a substrate and at least one radial channel extending into said wheel body from said peripheral groove. An edge wheel dryer and a method for processing a disk-shaped substrate are also described.

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