Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sang-rok Hah0
In-jun Yeo0
Jeong-lim Nam0
Kyung-hyun Kim0
Byoung-moon Yoon0
Hyun-ho Jo0
Date of Patent
August 15, 2006
0Patent Application Number
103836070
Date Filed
March 10, 2003
0Patent Primary Examiner
Patent abstract
The apparatus for cleaning a wafer includes an energy concentration relieving member positioned at the side of the wafer. An elongated portion of a probe extends over and substantially parallel to the wafer surface. A vibrator is attached to a rear end of the probe for vibrating the probe such that the elongated portion transfers acoustic vibrational energy to the wafer and dislodges debris.
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