US Patent 7091295 Amorphous perfluorinated polymers
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Patent Inventor Names
Francesco Triulzi0
Marco Apostolo0
Vincenzo Arcella0
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Patent abstract
Use of amorphous perfluorinated polymers for preparing transparent films at 157 nm, said perfluorinated polymers being free from unstable ionic end groups COF, COOH or their amidic derivatives, esters or salts, said polymers formed by cyclic units deriving from perfluorodioxoles of formula:
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US Patent 07091295 Amorphous perfluorinated polymers US Patent 7091295 Amorphous perfluorinated polymers
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Patent Number
07091295
Patent Number
7091295
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US Patent 07091295 Amorphous perfluorinated polymers
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Patent jurisdiction
Patent number
07091295
Date of patent
August 15, 2006
Patent application number
10835288
Date Filed
April 30, 2004
Patent primary examiner
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