Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 15, 2006
Patent Application Number
10662892
Date Filed
September 15, 2003
Patent Primary Examiner
Patent abstract
The present invention provides passive sampling systems and methods for monitoring contaminants in a semiconductor processing system. In one embodiment, that passive sampling system comprises a collection device in fluid communication with a sample line that provides a flow of gas from a semiconductor processing system. The collection device is configured to sample by diffusion one or more contaminants in the flow of gas.
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