Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasuo Hasegawa0
Yoshiki Kino0
Yoshinori Miwa0
Eiji Sakamoto0
Shinichi Hara0
Date of Patent
August 22, 2006
0Patent Application Number
107792140
Date Filed
February 13, 2004
0Patent Primary Examiner
Patent abstract
A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.
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