US Patent 7097677 Polishing slurry
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Patent Inventor Names
Noriaki Yokoi0
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Patent abstract
Polishing slurry has abrading particles dispersed in a liquid dispersant. The abrading particles are composite particles each having a first particle and a plurality of second particles smaller than the first particles attached to the surface of the first particle through a metal oxide membrane. The first particles have average diameter of 0.1–20 μm and the second particles have average diameter of 0.001–0.5 μm. Elastic particles may be used as the first particles such as polymer particles.
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US Patent 07097677 Polishing slurry US Patent 7097677 Polishing slurry
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Patent Number
07097677
Patent Number
7097677
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US Patent 07097677 Polishing slurry
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Patent jurisdiction
Patent number
07097677
Date of patent
August 29, 2006
Patent application number
10629206
Date Filed
July 29, 2003
Patent primary examiner
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