Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 29, 2006
Patent Application Number
10305339
Date Filed
November 27, 2002
Patent Primary Examiner
Patent abstract
A laser annealing apparatus for crystallizing a semiconductor film with a linearly radiating laser beam including a laser oscillator and laser optical systems for forming a laser beam radiated from the laser oscillator linearly, for application to a semiconductor film. Each linearly radiating laser beam from each laser optical system radiated onto the semiconductor film is arrayed almost linearly in a length direction, with an interval on the semiconductor film.
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