Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasutoshi Kitahara0
Masahiko Yazawa0
Shunsuke Kurata0
Yasunori Ikeno0
Haruyuki Tsuji0
Katsuyuki Hashimoto0
Date of Patent
September 5, 2006
0Patent Application Number
109780590
Date Filed
October 28, 2004
0Patent Primary Examiner
Patent abstract
A semiconductor wafer inspection apparatus is provided with a rotatable table on which a semiconductor wafer is held by suction, an illuminating device which illuminates at least an edge portion of the semiconductor wafer held on the rotatable table, an imaging device which captures an image of the edge portion of the semiconductor wafer when the edge portion is illuminated by the illuminating device, an image processing device which detects at least an edge cut amount or a crack by acquiring the image of the edge portion which is captured by the imaging device, and a display section which displays an image of the edge portion subjected to image processing by the image processing device.
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