Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alex De Vries0
Date of Patent
September 5, 2006
Patent Application Number
10926397
Date Filed
August 26, 2004
Patent Primary Examiner
Patent abstract
A lithographic production process according to one embodiment comprises an input section, pre-imaging processes, measurement of a substrate, exposure of the substrate, post-imaging processes, and output. A controller controls the time spent processing in the scanner based on an input of the rate at which substrates arrive from the pre-imaging processes. This control allows the scanner to optimize the accuracy of devices produced by selectively varying the duration of processes in the scanner.
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