Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Klaus F. Schuegraf0
Date of Patent
September 12, 2006
0Patent Application Number
097705400
Date Filed
January 26, 2001
0Patent Primary Examiner
Patent abstract
Thin film metal-insulator-metal capacitors having enhanced surface area are formed by a substituting metal for silicon in a preformed electrode geometry. The resulting metal structures are advantageous for high-density DRAM applications since they have good conductivity, enhanced surface area and are compatible with capacitor dielectric materials having high dielectric constant.
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