Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kenji Saitoh0
Kenji Yamazoe0
Akiyoshi Suzuki0
Date of Patent
September 12, 2006
0Patent Application Number
102515810
Date Filed
September 20, 2002
0Patent Primary Examiner
Patent abstract
A method for setting a mask pattern and an illumination condition suitable for an exposure method for using plural kinds of light to illuminate a mask that arranges a predetermined pattern and an auxiliary pattern smaller than the predetermined pattern, so as to resolve the predetermined pattern without resolving the auxiliary pattern on a target via a projection optical system includes the steps of forming data for the predetermined pattern, forming data for the auxiliary pattern, and setting the illumination condition for defining an effective light source of illumination using the plural kinds of light.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
