Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shigenori Kitahara0
Date of Patent
September 19, 2006
Patent Application Number
10345767
Date Filed
January 15, 2003
Patent Primary Examiner
Patent abstract
Pluralities of ultrasonic transducers are arranged on the bottom wall of the cleaning tank. The output power of the ultrasonic oscillator is supplied to the transducers through the switching unit, which switches the drive mode between a first mode in which all the ultrasonic transducers are supplied with the output power and thus are excited, and a second mode in which only a part or parts of the ultrasonic transducers are supplied with the output power generated by the ultrasonic oscillator. The first mode is used when cleaning substrates not-resistant to vibration, and the second mode is used when cleaning substrates resistant to vibration.
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