Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 19, 2006
Patent Application Number
10414107
Date Filed
April 16, 2003
Patent Primary Examiner
Patent abstract
After a Group III-V compound semiconductor layer, to which a p-type dopant has been introduced, has been formed over a substrate, the compound semiconductor layer is annealed. In the stage of heating the compound semiconductor layer, atoms, deactivating the p-type dopant, are eliminated from the compound semiconductor layer by creating a temperature gradient in the compound semiconductor layer.
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