Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toshihiko Tsuji0
Date of Patent
September 19, 2006
Patent Application Number
10769373
Date Filed
January 30, 2004
Patent Primary Examiner
Patent abstract
Attempting to provide an illumination optical system and an exposure apparatus using the same, which provide a more uniform angular distribution of light for illuminating a mask than the prior art, an illumination optical system for illuminating an object surface includes an optical unit that converts light from a light source section into approximately parallel light, and includes first and second mirrors, wherein the first mirror has an opening, through which light reflected by the second mirror passes.
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