Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jozef Petrus Henricus Benschop0
Johannes Catharinus Hubertus Mulkens0
Date of Patent
September 19, 2006
Patent Application Number
10867223
Date Filed
June 15, 2004
Patent Primary Examiner
Patent abstract
To improve the resolution of lithographic apparatus, a flexible member is provided between the projection system and the substrate. The flexible member may be filled with a fluid of a known refractive index. The flexible member may be in contact with both the projection system and the substrate.
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